Zeiss Auriga FIB FESEM

The Zeiss Auriga Dual Beam Field Emission Scanning Electron Microscope (SEM) enables standard SEM imaging and focused ion beam milling via a gallium ion source in a broad range of materials including biological, polymers, metallic, and semiconductor materials.  The dual beam nature of the Auriga allows for sequential FIB milling and SEM imaging, enabling the virtual 3D nanoscale reconstruction of a sample.  The Auriga SEM is equipped with two secondary electron detectors, a backscatter electron detector, and allows for scanning transmission electron microscopy (STEM) functionality as well.  The Auriga is also equipped with a Bruker Energy-dispersive X-ray spectroscopy detector to facilitate simultaneous elemental analysis during image capture.